T.H.C - Temperature & Humidity Controller
• High Accuracy Temperature & Humidity
• Air Velocity Control
• DUV process compatible
• Small Footprint, Space Saving
• Leakage Detection function, Touch Screen

Environmentally Safe
Excellent Design System for User' s Convenience
THC is equipment to supply a constant temperature and humidity to the manufacturing process spreading and
developing Photo Resister during semiconductor Photo resist( PR) process.
Application process : PR Process, Exposure Process