Conductive type: P Size: 156MMX156MM( + / -0.5MM) Thickness: 200+ / -30micrometer Resistivit y: 0.5-6ohm/ cm Life Time: 2.0microsecond Orientation: + / -3 TTV: 50micrometer Bow/ Warp: 40micrometer Perpendicularity: 90+ / -0.3 Oxygen content: 1.0x1018at/ cm3 Carbon content: 5.0x1016at/ cm3